TRANSFER SYSTEM

摘要

In a transfer system, at least one of a plurality of process apparatuses is connected to a station as a connected process apparatus. A station control unit controls a transfer device provided in the station through a communication with a process apparatus control unit to load the processing object to the connected process apparatus from the station and to unload the processing object from the connected process apparatus to the station. The station control unit controls the transfer device to begin unloading of the processing object from the connected process apparatus to the station after receiving a signal indicative of a presence of the processing object to be unloaded from the process apparatus control unit.

主权项

1. A transfer system comprising:
a plurality of process apparatuses each conducting a predetermined process to a processing object to be processed; a process apparatus control unit controlling the process apparatuses; a station storing the processing object; a transfer device provided in the station and transferring the processing object; and a station control unit controlling the transfer device, wherein at least one of the plurality of process apparatuses is connected to the station as a connected process apparatus, the station control unit controls the transfer device through a communication with the process apparatus control unit to load the processing object to the connected process apparatus from the station and to unload the processing object from the connected process apparatus to the station, and the station control unit controls the transfer device to begin unloading of the processing object from the connected process apparatus to the station after receiving a signal indicative of a presence of the processing object to be unloaded from the process apparatus control unit.