CRYSTALLINE ALLOY HAVING GLASS FORMING ABILITY, METHOD FOR MANUFACTURING SAME, ALLOY TARGET FOR SPUTTERING, AND METHOD FOR MANUFACTURING SAME

摘要

The purpose of the present invention is to provide a crystalline alloy having glass forming ability which has significantly superior thermal stability for being amorphous while having glass forming ability, and a manufacturing method for same. In addition, another purpose of the present invention is to provide an alloy target for sputtering, manufactured by using the crystalline alloy, and a method for manufacturing same. According to one aspect of the present invention, provided is the crystalline alloy having glass forming ability and comprising three or more elements having glass forming ability, wherein the average grain size of the alloy is 0.1-5 μm, and wherein the alloy comprises 67-78 atomic percentage of Zr, 4-13 atomic percentage of Al and/or Co, and 15-24 atomic percentage of Cu and/or Ni.

主权项

1. A crystalline alloy having amorphous forming ability, composed of three or more elements having an amorphous forming ability,
wherein the crystalline alloy has an average size of crystal grains in the range of 0.1 μm through 5 μm, wherein the alloy comprises 67 atomic % through 78 atomic % of Zr, 4 atomic % through 13 atomic % of one or more selected from Al and Co, and 15 atomic % through 24 atomic % of one or more selected from Cu and Ni.