| 摘要 |
To minimize the deposition of pollutant on a substrate, an electrode, and a magnetic pole, an ion source may have a magnetic field part, a gas injection extension part, and the electrode. One side of the magnetic field part is opened to face an object. An inner magnetic pole is separated from an outer magnetic pole on the opened one side. The other side is connected to a magnetic core. A plasma ignition and electron acceleration region is formed in the opened side of the magnetic field part. The inner magnetic pole or the outer magnetic pole has a gas injection part of which one side is opened in the direction of the object. The gas injection extension part is insulated from the outer magnetic pole or the inner magnetic pole, is combined with them, is connected to the gas injection part, and protrudes in the direction of the object. The electrode is separated from the magnetic field part. |
