发明名称 COMPOSITE OXIDE SINTERED BODY AND TRANSPARENT CONDUCTIVE OXIDE FILM
摘要 To provide a composite oxide sintered body from which an oxide transparent conductive film having lower light absorption properties in a wide wavelength region and having a low resistance can be obtained, and an oxide transparent conductive film. A composite oxide sintered body containing indium, zirconium, hafnium and oxygen, wherein the atomic ratio of the elements constituting the sintered body satisfies the following formulae, where In, Zr and Hf are respectively contents of indium, zirconium and hafnium: Zr / ln + Zr + Hf = 0.05 to 4.5 at % Hf / ln + Zr + Hf = 0.0002 to 0.15 at %
申请公布号 EP2883979(A4) 申请公布日期 2016.03.16
申请号 EP20130827753 申请日期 2013.08.08
申请人 TOSOH CORPORATION 发明人 KURAMOCHI, HIDETO;TAMANO, KIMIAKI;AKIIKE, RYO;IIGUSA, HITOSHI
分类号 C23C14/34;C04B35/00 主分类号 C23C14/34
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