IMAGE ACQUISITION DEVICE AND METHOD AND SYSTEM FOR CREATING FOCUS MAP FOR SPECIMEN

摘要

An image acquisition device reciprocates a focal position of an objective lens with respect to a sample in the optical axis direction of the objective lens, while moving a field position of the objective lens with respect to the sample. This makes it possible to acquire contrast information of image data at the field position of the objective lens sequentially as the field position moves with respect to the sample. The image acquisition device acquires the image data by the rolling readout of the image pickup element according to the reciprocation of the focal position of the objective lens.

主权项

1. An apparatus for capturing an image comprising:
a stage configured to support a sample; an objective lens configured to face to the sample; a two-dimensional image sensor including a plurality of pixel columns and configured to capture an optical image of the sample; a calculator configured to calculate focus information of the sample according to image data from the image sensor; a generator configured to generate a focus map of the sample according to the focus information; a first driver configured to move a field position of the objective lens with respect to the sample; a second driver configured to change a focal position of the objective lens with respect to the sample; and a controller configured to control the image sensor, first driver, and second driver; wherein the image sensor is adapted to perform rolling readout; wherein the controller controls the first and second driver so as to reciprocate the focal position of the objective lens with respect to the sample in an optical axis direction of the objective lens while moving the field position of the objective lens with respect to the sample and acquires the image data by the rolling readout of the image sensor; and wherein the generator generates the focus map according to a plurality of pieces of the focus information calculated by calculator.