| 摘要 |
The present invention provides a piezoelectric film having a higher polarization-disappearance temperature Td and the usage thereof. The piezoelectric film of the present invention comprising an interface layer of (Nax1, Biy1)TiO0.5x1+1.5y1+2-BaTiO3 layer having a (001) orientation only and a piezoelectric layer of a (Nax2, Biy2)TiO0.5x2+1.5y2+2-BaTiO3 layer having a (001) orientation only, where x1 is 0.28-0.43, y1 is 0.49-0.60, x2 is 0.30-0.46, and y2 is 0.51-0.63. The piezoelectric layer is formed on the interface layer. The interface layer contains nickel. The interface layer has a Ni/Ti molar ratio of not less than 0.02. |
