发明名称 |
ELECTRICAL CONTACTING DEVICE |
摘要 |
An electrical contacting device for electrical physical contact with a specimen, particularly wafers, taking place in a contacting direction, with at least one conductor substrate which can be electrically connected to a testing device, at least one contact distance transformer and at least one contact head having electrical contact elements, particularly resilient contact elements, preferably serving to compensate different physical contact distances existing in the contacting direction particularly at the contact elements. |
申请公布号 |
EP2994762(A1) |
申请公布日期 |
2016.03.16 |
申请号 |
EP20140715230 |
申请日期 |
2014.03.25 |
申请人 |
FEINMETALL GMBH |
发明人 |
BÖHM, GUNTHER;STEIDLE, GEORG;SCHÄFER, WOLFGANG;WEILAND, ACHIM |
分类号 |
G01R1/073;G01R31/28;H01R12/71;H01R12/85 |
主分类号 |
G01R1/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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