发明名称 DICING TAPE-INTEGRATED FILM FOR SEMICONDUCTOR BACK SURFACE AND METHOD FOR PRODUCING THE FILM, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
摘要 The present invention relates to a dicing tape-integrated film for the back surface of a semiconductor, comprising a dicing tape including a base material having an asperities-formed surface, and an adhesive layer laminated on the base material; and a film for the back surface of a semiconductor laminated on the adhesive layer of the dicing tape, wherein the dicing tape has a haze of at most 45%. The purpose of the present invention is to provide a dicing tape-integrated film for the back surface of a semiconductor having high light transmittance in inspection of semiconductor chips after a dicing process, and having excellent visibility of a semiconductor chip image, a manufacturing method thereof, and a method for manufacturing a semiconductor device using the film.
申请公布号 KR20160030159(A) 申请公布日期 2016.03.16
申请号 KR20160026573 申请日期 2016.03.04
申请人 NITTO DENKO CORPORATION 发明人 TAKAMOTO NAOHIDE;SHIGA GOJI;ASAI FUMITERU
分类号 H01L21/683;C09J7/02;H01L21/66;H01L21/78 主分类号 H01L21/683
代理机构 代理人
主权项
地址