发明名称 Improving metal contacts to group IV semiconductors by inserting interfacial atomic monolayers
摘要 An electrical contact comprising a metal and a group IV semiconductor separated by a monolayer of group V atoms at an interface between the metal and the group IV semiconductor, the atoms of the monolayer being epitaxially aligned with a lattice structure of the group IV semiconductor. This results in the specific contact resistance of the metal being reduced. In one embodiment the metal may be a ferromagnetic metal. The application further discloses the use of III-V bi layers as well as group III monolayers.
申请公布号 GB2526950(A9) 申请公布日期 2016.03.16
申请号 GB20150011956 申请日期 2012.10.18
申请人 ACORN TECHNOLOGIES, INC 发明人 WALTER A HARRISON;PAUL A CLIFTON;ANDREAS GOEBEL;R STOCKTON GAINES
分类号 H01L21/285;H01L29/04 主分类号 H01L21/285
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