发明名称 NBT−BT結晶圧電体膜およびそれを具備する圧電積層構造体
摘要 The present invention provides an NBT-BT film having a higher polarization-disappearance temperature. The present invention is a [(Na,Bi)1-xBax]TiO3 crystal piezoelectric film. The [(Na,Bi)1-xBax]TiO3 crystal piezoelectric film has a (001) orientation only. The [(Na,Bi)1-xBax]TiO3 crystal piezoelectric film has a-axis length of not less than 0.390 nanometers and not more than 0.395 nanometers. The [(Na,Bi)1-xBax]TiO3 crystal piezoelectric film has c-axis length of not less than 0.399 nanometers and not more than 0.423 nanometers (where x represents a value of not less than 0 and not more than 1). The [(Na,Bi)1-xBax]TiO3 crystal piezoelectric film has a polarization-disappearance temperature of not less than 389 degrees Celsius.
申请公布号 JP5887502(B2) 申请公布日期 2016.03.16
申请号 JP20140127974 申请日期 2014.06.23
申请人 パナソニックIPマネジメント株式会社 发明人 田中 良明;橋本 和弥;張替 貴聖;足立 秀明;藤井 映志
分类号 H01L41/187;H01L41/09;H01L41/113;H01L41/319 主分类号 H01L41/187
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