| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid feeder having a new structure that can combine the simplification of the structure and the cleanliness improvement of circulated liquid and suppress liquid dripping at a use part after the supply stop of the liquid. <P>SOLUTION: The liquid feeder 1A includes a liquid supply part 10, a liquid use part 20, and a supply piping part 30 for circulating liquid from the supply part to the use part. The supply piping part includes a main piping part 31 circulating liquid supplied from the supply part side; an aspirator 50 connected to the main piping part; a use side piping part 32 and a sub-piping part 33 branched by the aspirator to supply liquid to the use part side; and a valve 16 connected to the sub-piping part and having an opening/closing function. The main piping part and the sub-piping part are connected to the main passage side of the aspirator, and the use side piping part is connected to the suction passage side of the aspirator. <P>COPYRIGHT: (C)2013,JPO&INPIT |
