发明名称 WORKPIECE HOLDING DEVICE
摘要 PURPOSE:To prevent the deterioration of machining accuracy due to the distortion of a workpiece by constituting a block, having a sucker surface, of reference blocks and a movable block, providing a flat plate, having an elastic deformation supporting point in the vicinity of the both ends, in the movable block, displacement detecting member and the sucker surface in the central part of the flat plate, detecting the displacement before and after the sucking and changing the sucker surface by a clearance. CONSTITUTION:A base bed 11 fixedly provides reference blocks 9, 9 while a base member 1 of a movable block 8. A flat plate 2 is fixed onto both end protruding parts 1a of the base member 1. Forming elastic deformation supporting points 2b in the vicinity of both ends of the flat plate 2, the flat plate 2 provides in its central part a sucker part 3 and a contact piece 5 of a displacement detecting member 4 urged in such a manner as protruding from the sucker part 3. A fine displacement generating member 6 is provided in the bottom surface of the flat plate 2. Accordingly, a clearance between a workpiece 10 and the sucker part 3 can be automatically detected, and machining accuracy can be improved because the distortion of the workpiece 10, generated after it is sucked, can be corrected by actuating the fine displacement generating means 6.
申请公布号 JPS6411744(A) 申请公布日期 1989.01.17
申请号 JP19870165347 申请日期 1987.07.03
申请人 HITACHI LTD 发明人 FURUKAWA TAKAYASU;MORIYAMA SHIGEO
分类号 B23Q3/15;B23Q1/34;B23Q17/22;B24B37/30;B24B41/06;B25B11/00;H01L21/304;H01L21/68 主分类号 B23Q3/15
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