发明名称 荷電粒子線顕微鏡、荷電粒子線顕微鏡用試料ホルダ及び荷電粒子線顕微方法
摘要 An apparatus that can capture a rotation series of images of an observation area within a range of −180° to +180° around the x axis thereof, and can capture a rotation series of images of the observation area within a range of −180° to +180° around the y axis thereof. The apparatus includes a sample mounting base having at its tip portion a mounting portion for mounting a sample thereon; a rotating jig having a mounting base holding portion that holds the sample mounting base; a sample holding rod that includes a holding portion that holds the rotating jig; a first rotation control unit that applies, to the sample holding rod, a first rotation within a range of −180° to +180° with the extending direction of the sample holding rod as the axis thereof; and a second rotation control unit that applies, to the rotating jig, a second rotation within a range of ±45° or more with the direction orthogonal to the rotation axis of the first rotation as the axis thereof, the sample mounting base being in a conical or polygonally conical form.
申请公布号 JP5883658(B2) 申请公布日期 2016.03.15
申请号 JP20120009554 申请日期 2012.01.20
申请人 株式会社日立ハイテクノロジーズ 发明人 常田 るり子;菊池 秀樹;鹿島 秀夫
分类号 H01J37/20;H01J37/26 主分类号 H01J37/20
代理机构 代理人
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