Semiconductor system assemblies and methods of operation

摘要

An exemplary semiconductor processing system may include a remote plasma source coupled with a processing chamber having a top plate. An inlet assembly may be used to couple the remote plasma source with the top plate and may include a mounting assembly, which in embodiments may include at least two components. The inlet assembly may further include a precursor distribution assembly defining a plurality of distribution channels fluidly coupled with an injection port.

主权项

1. A semiconductor processing system comprising:
a remote plasma source; a processing chamber having a top plate having a first surface, and defining a recess within the first surface; and an inlet assembly coupling the remote plasma source with the top plate and comprising: a precursor distribution assembly defining a plurality of distribution channels fluidly coupled with an injection port, and a mounting assembly comprising:
a gas block coupled between the remote plasma source and the precursor distribution assembly, anda mounting block coupled between the precursor distribution assembly and the top plate, wherein the mounting block extends past the first surface of the top plate to couple with the top plate within the recess.