MEMS device and method of making a MEMS device

摘要

A MEMS device and a method of making a MEMS device are disclosed. In one embodiment a semiconductor device comprises a substrate, a moveable electrode and a counter electrode, wherein the moveable electrode and the counter electrode are mechanically connected to the substrate. The movable electrode is configured to stiffen an inner region of the movable membrane.

主权项

1. A method of making an electrode of a MEMS device, the method comprising:
forming elongated radial openings in a mask layer, the mask layer disposed over a first sacrificial layer, the elongated radial openings exposing first surface portions of the first sacrificial layer, the elongated radial openings leading away from a center point of the first sacrificial layer; forming first elongated isolation regions at the exposed first surface portions; forming a second sacrificial layer over the first sacrificial layer; forming a conductive layer over the second sacrificial layer; removing a first portion of the first sacrificial layer forming a first spacer; and removing a second portion of the second sacrificial layer forming a second spacer.