| 摘要 |
The present invention provides a substrate accommodating container properly permitting carrying out of a substrate, a load port device, and a substrate processing device. The substrate accommodating container includes: a housing; a shelf member; a support member for a housing, supporting an end of the substrate; a moving device moving the substrate; a cover; and a support member for a cover, which supports the end of the substrate. The support member for a housing includes an innermost unit supporting the end of the substrate (W) to be immovable to the upper side. When the cover is attached on the housing, the support member for a housing and the support member for a cover clamp the end of the substrate in a state in which the lower surface of the substrate is not in contact with the shelf member. Also, the support member for the housing supports the end of the substrate in the innermost unit. When the cover is separated from the housing, the moving device moves the substrate supported in the innermost part to separate the end of the substrate from the innermost unit and mounts the substrate on the shelf member in a horizontal posture. |
