发明名称 |
レーザ加工装置 |
摘要 |
A laser processing device including: a laser oscillator; a processing table; a transmission optical system for transmitting laser light emitted from the laser oscillator to the processing table; a processing head for condensing and radiating the laser light transmitted via the transmission optical system to an object to be processed; a moving mechanism for changing a relative position between the object to be processed and the laser light to be radiated to the object to be processed; and a variable curvature spherical mirror. The transmission optical system includes a reflective beam expander mechanism for collimating and magnifying the laser light from the laser oscillator. The reflective beam expander mechanism includes a spherical mirror and a concave mirror having different curvatures in two orthogonal axes. |
申请公布号 |
JP5885173(B2) |
申请公布日期 |
2016.03.15 |
申请号 |
JP20140521265 |
申请日期 |
2013.05.31 |
申请人 |
三菱電機株式会社 |
发明人 |
中村 直幸;山本 達也;西前 順一;藤川 周一;瀬口 正記;西尾 彰倫;村井 博幸;猿田 健児 |
分类号 |
B23K26/064;B23K26/00;B23K26/073;B23K26/08;H01S3/00;H01S3/10 |
主分类号 |
B23K26/064 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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