发明名称 流体処理システム及び方法
摘要 Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel is subjected to filling by application of vacuum between the liner and overpack. Multiple feed material flow controllers of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materials supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.
申请公布号 JP5883977(B2) 申请公布日期 2016.03.15
申请号 JP20150124836 申请日期 2015.06.22
申请人 アドバンスド テクノロジー マテリアルズ,インコーポレイテッド 发明人 ルーコット,スティーブン,エム.;ヒューズ,ジョン,イー.キュー.;ルシュカ,ピーター;バウム,トーマス,エイチ.;ウェア,ドナルド,ディー.;ズー,ペン
分类号 B65B3/16;B01F15/04 主分类号 B65B3/16
代理机构 代理人
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