Methods, systems, and articles of manufacture for implementing correct-by-construction physical designs with multiple-patterning-awareness

摘要

Disclosed are methods, systems, and articles of manufactures for implementing correct-by-construction physical designs with multiple-patterning-awareness by identifying a first set of grids for a layer based at least in part upon characteristics of other layer(s), identifying a set of tracks for the layer to implement the physical design for the layer, and implementing a shape in the physical design by at least terminating an end of the shape at a grid of the identified first set of grids. The end of the shape may be extended or contracted from its as-design location to the grid. The physical design thus implemented is correct-by-construction and is free of violations of one or more directional design rules.

主权项

1. A computer implemented method for implementing correct-by-construction physical designs with multiple-patterning-awareness, comprising:
at least one processor performing a process, the process comprising: identifying a first set of routing tracks for a first layer in the electronic design; selecting a first set of grids for the first layer based at least on the first set of routing tracks and one or more adjacent layers of the first layer; and implementing a first shape in a physical design for the first layer by at least extending a first shape end of the first shape to a first grid of the first set of grids or by contracting the first shape end of the first shape to a second grid of the first set of grids.