| 摘要 |
<P>PROBLEM TO BE SOLVED: To make the surface of a film more inorganic, the film being formed of a polysiloxane-based organic-inorganic composite and having the surface with a higher hardness than the interior. <P>SOLUTION: An organic-inorganic composite thin film has a layer comprising (a) a condensate of an organosilicon compound represented by formula (I): R<SB POS="POST">n</SB>SiX<SB POS="POST">4-n</SB>(wherein R represents an organic group in which a carbon atom bonds directly to Si; X represents a hydroxyl group or a hydrolyzable group; n represents 1 or 2, when n is 2, respective R may be the same or different, and when (4-n) is ≥2, respective X may be the same or different), and (b) an organic polymer compound. A layer enriched with the condensate of the organosilicon compound represented by the formula (I) has been formed on the surface of the film, the concentration of carbon atoms at a depth of 10 nm from the surface is lower than that at a depth of 100 nm from the surface by ≥20%, and the elemental ratio of O/Si at a depth of 2 nm from the film surface is 1.8-2.5. <P>COPYRIGHT: (C)2013,JPO&INPIT |
