| 摘要 |
PROBLEM TO BE SOLVED: To achieve a sensor having high measurement accuracy and manufactured easily and low cost.SOLUTION: A pressure sensor includes: a sensor substrate with a strain gage element provided on one element surface thereof and a diaphram formed on the other grinding polishing surface which is polished; a base substrate joined onto the grinding polishing surface; a recess provided in a junction between the base substrate and the sensor substrate and having a prescribed clearance; and an introduction hole for introducing a measuring pressure into the recess. |
