METHOD OF CALCULATING A SHIFT VALUE OF A CELL CONTACT

摘要

According to a method for calculating a shift value of a cell contact, a reference region and a correction region can be set on an image of an actual cell block which includes a plurality of cell contacts formed by using a mask. Each of preliminary shift values of the actual cell contacts with respect to target cell contacts in a target cell block to be formed using the mask can be measured based on the image. The preliminary shift values of the actual cell contacts in the reference region can be minimized. Actual shift values of the actual cell contacts in the correction region with respect to the minimized preliminary shift values can be calculated. Therefore, the mask can be corrected by using the accurately calculated shift values so that the cell contacts can be formed in accordance with a design.