懸架されたビーム及びビームの変位を検出するピエゾ抵抗手段を有するデバイス及びデバイスを製造する方法

摘要

A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively.