FILM FORMING DEVICE AND FILM FORMING METHOD USING SAME.

摘要

Provided are a film forming device and film forming method capable of improving cooling efficiency and having greatly reduced risk of refrigerant leaks. This film forming device (1) is provided with: a cooling unit (4) which cools a workpiece (W) in a space (2e) of a chamber (2); a rotation table main body (11) which rotates around a vertical axis in a state in which the workpiece (W) is mounted and which comprises a cooling unit mounting unit (21) where the cooling unit (4) is mounted and a workpiece mounting unit (22) which is arranged so as to surround the periphery of said cooling unit mounting unit (21) and where the workpiece (W) is arranged; a lifting mechanism (5) which raises and lowers the cooling unit (4) inside of the space (2e) between a first position where the rotation table main body (11) is mounted and a second position spaced upward from the rotation table main body (11) and opposite of lateral surface of the workpiece (W) mounted in the workpiece mounting unit (22); and refrigerant piping (6) which is attached to the chamber (2), is detachably connected to the cooling unit (4) and supplies the refrigerant to the cooling unit (4).