发明名称 LEAK DETECTION APPARATUS
摘要 The present invention relates to an apparatus for detecting a leakage solution, enabling to have an even resistance value by forming a conductive line with a sputtering method on the upper surface of a base film layer, and preventing the upper protective film layer from being easily separated by enabling the conductive line with a sputtering method to have the thickness less than or equal to 1 μm. In addition, the apparatus is capable of detecting the leakage of various solution, by progressing the sputtering process by different metals, laminating the other conductive line on the upper surface of the conductive line, and forming the same.
申请公布号 KR20160029612(A) 申请公布日期 2016.03.15
申请号 KR20140119484 申请日期 2014.09.05
申请人 YUMIN SYSTEM TECHNOLOGY;YU, HONG GEUN 发明人 YU, HONG GEUN
分类号 G01M3/16;C23C14/34 主分类号 G01M3/16
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