| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an unpowered wireless sensor module and a wireless physical quantity detection system, that can enlarge the sensing range of a sensor as compared with a conventional unpowered wireless sensor module. <P>SOLUTION: A sensor module 200 includes a piezoelectric substrate 202 generating a surface acoustic wave by a piezoelectric effect. The piezoelectric substrate 202 is fixed on a conductive substrate 205 coated with an insulation layer 204. On the piezoelectric substrate 202, a surface acoustic wave conversion IDT 206 mutually converting a high-frequency signal and a surface acoustic wave between an antenna 208 and a piezoelectric substrate 202, and a surface acoustic wave reflection IDT 207 connected to a thermistor 209, in which the reflectance of a surface acoustic wave changes depending on the impedance change of the thermistor 209 are disposed to face each other. The surface acoustic wave conversion IDT 206, the surface acoustic wave reflection IDT 207, and the thermistor 209 are electrically connected to each other via the conductive substrate 205, and receive a common potential. <P>COPYRIGHT: (C)2013,JPO&INPIT |
