プラズマ処理用ガス供給管ユニットおよびそれを用いる被膜形成方法,申请号JP20120031685-传众专利搜索

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发明名称	プラズマ処理用ガス供給管ユニットおよびそれを用いる被膜形成方法
摘要
申请公布号	JP5884540(B2)	申请公布日期	2016.03.15
申请号	JP20120031685	申请日期	2012.02.16
申请人	凸版印刷株式会社	发明人	鹿嶋浩人
分类号	C23C16/455;C23C16/50	主分类号	C23C16/455
代理机构		代理人
主权项
地址

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