Reticle transfer system and method

摘要

A fabrication system comprises a global system comprising a plurality of stockers and a global transportation system connected to the stockers, a local system coupled to the global system through the global transportation system, wherein the local system comprises a first buffer located at a boundary between the global system and the local system, a plurality of lithography apparatuses coupled to the first buffer through a local transportation system and an empty pod buffer.

主权项

1. A fabrication system comprising:
a global system comprising a plurality of stockers and a global transportation system connected to the stockers; a local system coupled to the global system through the global transportation system, wherein the local system comprises:
a first buffer located at a boundary between the global system and the local system;a plurality of lithography apparatuses coupled to the first buffer through a local transportation system;an aisle, wherein a first terminal of the aisle is connected to the first buffer;a first rail coupled between the first buffer and a first group of lithography apparatuses;a second rail coupled between the first buffer and a second group of lithography apparatuses, wherein the first group of lithography apparatuses and the second group of lithography apparatuses are on opposite sides of the aisle;a second buffer connected to a second terminal of the aisle;an internal buffer located between the first buffer and the second buffer, wherein the internal buffer is adjustable; andan empty pod buffer.