发明名称 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 The present invention relates to a semiconductor memory device and a method for manufacturing the same. The semiconductor memory device according to the present invention includes: a stacked structure including conductive patterns and interlayer insulation patterns which are alternately stacked; a through-hole for penetrating the stacked structure; a channel pattern which is formed inside the through-hole; a first capping conductive pattern which is formed on the channel pattern; a second capping conductive pattern which is formed on a side wall of the first capping conductive pattern to surround the first capping conductive pattern; and a contact plug which is formed on the first capping conductive pattern and the second capping conductive pattern. The present invention provides the semiconductor memory device capable of improving margin of a contact connected to a vertical channel of a three-dimensional semiconductor memory device, and the method for manufacturing the same.
申请公布号 KR20160028742(A) 申请公布日期 2016.03.14
申请号 KR20140117662 申请日期 2014.09.04
申请人 SK HYNIX INC. 发明人 LEE, HYUN HO
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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