| 摘要 |
The present invention relates to a system to shorten a testing time of various semiconductor devices under the condition which tests different temperatures, and a method thereof. In a semiconductor device testing method of a semiconductor device testing system wherein a chamber for controlling the temperature is divided into a plurality of virtual zones, one or more individual device testing boards are included in each virtual zone, and different types of semiconductor devices are tested in a chamber at the same time, the semiconductor device testing method according to the present invention comprises: a first step of collecting next test temperature and test time information from the virtual zones; a second step of selecting a target temperature among the collected test temperatures; a third step of controlling the temperature of the chamber as the target temperature; a fourth step of performing a test in the virtual zone wherein the target temperature is the test temperature and maintaining a standby state in the remaining virtual zone; and a fifth step of repeatedly performing the first step if all test time corresponding to the target temperature is completed. |
