发明名称 STRUCTURE OF FIN FEATURE AND METHOD OF MAKING SAME
摘要 A semiconductor device comprises a first fin feature embedded within an isolation structure disposed over a semiconductor substrate, the first fin structure having a first sidewall, a second opposing sidewall, and a top surface extending from the first sidewall to the second sidewall. The device also includes a second fin feature disposed over the isolation structure and having a third sidewall and a fourth sidewall. The third sidewall is aligned with the first sidewall of the first fin structure. The device also includes a gate dielectric layer disposed directly on the top surface of the first fin structure, the third sidewall and the fourth sidewall of the second fin feature and a gate electrode disposed over the gate dielectric.
申请公布号 KR20160028934(A) 申请公布日期 2016.03.14
申请号 KR20140182412 申请日期 2014.12.17
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 WEN TSUNG YAO;LAI BO YU
分类号 H01L29/66;H01L29/78 主分类号 H01L29/66
代理机构 代理人
主权项
地址
您可能感兴趣的专利