IMPROVED SUBSTRATE SPRAY COATING APPARATUS AND METHOD

摘要

Disclosed are an improved substrate spray coating device and an improved substrate spray coating method. The substrate spray coating device according to an embodiment of the present invention comprises: a substrate; a third electrode for supporting the substrate; a second electrode provided under the substrate and having a plurality of through holes; a second power supply device connected to the second electrode; and a surface acoustic wave spray device provided under the second electrode. The surface acoustic wave spray device includes: a surface acoustic wave generation device having an ink passage manifold, through which ink supplied from an ink supply member passes, and a plurality of first electrodes or a pair of first electrodes provided on one or both sides of the ink passage manifold to be spaced apart from each other by a predetermined distance and generating spray particles of the ink passing through the ink passage manifold in a plurality of generation positions by using surface acoustic waves generated by vibrating the first electrodes or the pair of first electrodes; a first power supply device connected to the first electrodes or the pair of first electrodes; and an ink recovery member connected to the ink passage manifold to recover the ink. The surface acoustic wave generation device is provided at a predetermined tilt angle to the horizontal plane, and the distances from the generation positions of the spray particles of the ink to the through holes are identical.