发明名称 METAL SUBSTRATE AND MASK USING THE SAME
摘要 The present invention relates to a metal substrate and a deposition mask using the same with maximized deposition efficiency. The purpose of the present invention is to provide a deposition mask and a metal layer with a torsional index (Hr) to minimize twisting caused when the metal substrate etching is conducted to make a deposition mask. According to the present invention, the metal substrate comprises a base metal panel having a thickness. The base metal panel includes first and second surfaces facing each other, configured to provide an etching area.
申请公布号 KR101603200(B1) 申请公布日期 2016.03.14
申请号 KR20150094246 申请日期 2015.07.01
申请人 LG INNOTEK CO., LTD. 发明人 ROH, GEON HO;HWANG, JOO HYUN;LEE, SANG BEUM;CHO, SU HYEON;HAN, TAE HOON;KIM, NAM HO;MUN, BYUNG YOUL;PARK, JAE SEOK;SON, HYO WON;LIM, JEONG RYONG
分类号 H01L51/56;H01L51/00 主分类号 H01L51/56
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