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发明名称
电连接端子
摘要
计的物品是电连接端子,例如:如「使用状态参考图」所示,可作为配备在基板电镀装置的固定保持构件之下部电性接点来使用,抵接于配备在可动保持构件之上部电性接点的下端部,可对于配置在支持面上的基板(晶圆)进行通电,以施行电镀。 后视图与前视图相同,后视图省略。 左侧视图与右侧视图相对称,左侧视图省略。
申请公布号
TWD174323
申请公布日期
2016.03.11
申请号
TW104303739
申请日期
2015.07.14
申请人
荏原制作所股份有限公司
发明人
分类号
13-03
主分类号
13-03
代理机构
代理人
林志刚
主权项
地址
日本
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