| 摘要 |
The present invention relates to a method for inspecting a blanking device of a multi-charged particle beam. According to the present invention, the method for inspecting the blanking device of the solar multi-charged particle beam is intended to inspect each of the defective blacking apparatus of the blanking device. By using the blanking device, a first electric potential is applied to a first electrode from a first electric potential applying part with respect to each of the blanking apparatus of the blanking device. While a second electric potential is applied to a second electrode from a second electric potential applying part corresponding to at least one second electric potential applying part, measured is a first current value flowing from a power supply which supplies power of the first and the second electric potential difference to the each of the blanking apparatus. The measured first current value is finite, and a single blanking apparatus among the plurality thereof is considered to include a short circuit occurred therein, if the measured first current value is below the predetermined first critical value. |
