| 摘要 |
PROBLEM TO BE SOLVED: To provide a position correction/conveyance stage device capable of recognizing a position of an electrode foil or a separator or recognizing a fusing position with high accuracy, and a correction method for a position correction/conveyance stage.SOLUTION: The position correction/conveyance stage device includes a stage for correcting a position of a packaging separator and conveying the packaging separator while sucking and holding the packaging separator. The position correction/conveyance stage device also includes a driving device that moves in an X-axis direction and a Y-axis direction and rotates within an XY plane to correct the position of the packaging separator, and is included in a lower part of the stage. In an upper part of the stage, the device includes: a transparent plate including a suction groove for sucking an overall surface of the packaging separator; a semi-transparent permeation plate including a plurality of suction holes; illumination means for radiating light from a lower side of the permeation plate; imaging means for imaging the packaging separator from an upper side of the stage while being irradiated with light; and control means for calculating a positional displacement amount of the packaging separator on the basis of a captured image. On the basis of the positional displacement amount of the packaging separator, the position of the packaging separator is corrected by the driving device.SELECTED DRAWING: Figure 4 |
