TOPOGRAPHY SIMULATION APPARATUS, TOPOGRAPHY SIMULATION METHOD AND RECORDING MEDIUM

摘要

In one embodiment, a topography simulation apparatus includes a division module to divide a calculating area for calculating topography of a substance into cells and express the topography using filled cells and vacant cells, and a calculation module to calculate a filling rate for a target cell based on processing rates for its neighboring cells. The calculation module calculates, based on the processing rates for the neighboring cells, contributing rates of the neighboring cells contributing to the filling rate for the target cell. The calculation module calculates, based on the contributing rates of the neighboring cells, the filling rate for the target cell. One of the contributing rates of the neighboring cells of the target cell depends on whether another neighboring cell of the target cell is a first cell whose filling ratio belongs to first range or a second cell whose filling ratio belongs to second range.

主权项

1. A topography simulation apparatus comprising:
a division module configured to divide a calculating area for calculating topography of a substance into a plurality of cells, and to express the topography of the substance using filled cells which are filled with a predetermined amount of the substance and vacant cells which are not filled with the predetermined amount of the substance; and a calculation module configured to calculate a filling rate for a target cell in the calculating area, based on processing rates for neighboring cells which neighbor to the target cell, the calculation module comprising: a contributing rate calculation module configured to calculate, based on the processing rates for the neighboring cells, contributing rates of the neighboring cells contributing to the filling rate for the target cell; and a filling rate calculation module configured to calculate, based on the contributing rates of the neighboring cells, the filling rate for the target cell, wherein one of the contributing rates of the neighboring cells of the target cell depends on whether another neighboring cell of the target cell is a first cell whose filling ratio of the substance belongs to a first range or a second cell whose filling ratio of the substance belongs to a second range different from the first range.