| 发明名称 |
PRODUCTION MANAGEMENT APPARATUS, PRODUCTION MANAGEMENT METHOD AND RECORDING MEDIUM |
| 摘要 |
In one embodiment, a production management apparatus includes a flow obtaining module configured to obtain a plurality of processing flows to process a wafer from a flow storage module. The apparatus further includes a route creating module configured to select a plurality of steps from the plurality of processing flows, and configured to create a processing route to execute the plurality of steps selected from the plurality of processing flows. The apparatus further includes a flow creating module configured to select a plurality of steps from the processing route, and configured to create a new processing flow including the plurality of steps selected from the processing route. |
| 申请公布号 |
US2016070250(A1) |
申请公布日期 |
2016.03.10 |
| 申请号 |
US201514616109 |
申请日期 |
2015.02.06 |
| 申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
TAKAHASHI Kensuke;YAMADA Katsumi |
| 分类号 |
G05B19/042;G05B15/02 |
主分类号 |
G05B19/042 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A production management apparatus comprising:
a flow obtaining module configured to obtain a plurality of processing flows to process a wafer from a flow storage module; a route creating module configured to select a plurality of steps from the plurality of processing flows, and configured to create a processing route to execute the plurality of steps selected from the plurality of processing flows; and a flow creating module configured to select a plurality of steps from the processing route, and configured to create a new processing flow including the plurality of steps selected from the processing route. |
| 地址 |
Tokyo JP |
