ZINC OXIDE SUBSTRATE AND METHOD FOR PRODUCING GROUP 13 NITRIDE CRYSTAL USING SAME

摘要

Provided is a zinc oxide substrate which contains 0.1% by weight or more of Mg, and which is used for the purpose of growing a group 13 nitride crystal thereon by an MOCVD method. A zinc oxide substrate according to the present invention enables growth of a group 13 nitride crystal having excellent crystallinity on a substrate by an MOCVD method without forming an insulating layer in advance.