| 摘要 |
The present invention relates to an apparatus for treating a substrate. According to one embodiment of the present invention, an apparatus for treating a substrate performs a printing process in an inkjet scheme. The apparatus for treating a substrate can include: a support unit supporting a substrate; a head unit including one or more heads spraying a process liquid on the substrate supported by the support unit; a gantry coupled with the heads and movable on an upper side of the support unit; a process liquid supply unit storing the process liquid supplied to the heads; and a controller controlling the apparatus for treating a substrate. The controller can include a head controller controlling the heads individually, and a printing controller communicating with the head controller and controlling an independent function with the heads. |
