| 摘要 |
PROBLEM TO BE SOLVED: To provide a scribing device capable of precisely scribing even a thin plate or a small-sized substrate from a rear surface.SOLUTION: A scribing device A, which mounts a brittle material substrate M on a pair of support mechanisms 1 placed at an interval P, scribes a rear surface of the brittle material substrate M by rotating a cutter wheel 2 from a lower side of the interval P. The scribing device A includes: a cutter wheel support 3 which has the cutter wheel 2 at an upper end part; and a scribing head 5 which has a drive part 4 for elevating the cutter wheel support 3. The cutter wheel support 3 has length L along a width direction of the interval P formed within a range of the interval P, and in a state that the cutter wheel 2 is elevated to a scribing position on the rear surface of the brittle material substrate M, the length of the cutter wheel support 3 is placed so that an upper end of the scribing head 5 is not in contact with a lower part of the support mechanism 1.SELECTED DRAWING: Figure 3 |
