| 发明名称 |
METHOD AND TECHNIQUE TO CONTROL MEMS DVC CONTROL WAVEFORM FOR LIFETIME ENHANCEMENT |
| 摘要 |
The present invention generally relates to a method of operating a MEMS DVC while minimizing impact of the MEMS device on contact surfaces. By reducing the drive voltage upon the pull-in movement of the MEMS device, the acceleration of the MEMS device towards the contact surface is reduced and thus, the impact velocity is reduced and less damage of the MEMS DVC device occurs. |
| 申请公布号 |
US2016072408(A1) |
申请公布日期 |
2016.03.10 |
| 申请号 |
US201414889118 |
申请日期 |
2014.05.16 |
| 申请人 |
CAVENDISH KINETICS, INC |
发明人 |
KHIEU Cong Quoc;HUFFMAN James Douglas;KNIPE Richard L.;JOSHI Vikram;VAN KAMPEN Robertus Petrus |
| 分类号 |
H02N1/00;H01G5/18;H01G5/011;B81B7/02 |
主分类号 |
H02N1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of operating a MEMS DVC device, comprising:
applying a first voltage to an electrode for a first period of time; increasing the first voltage to a second voltage, wherein the increasing occurs for a second period of time; decreasing the second voltage to a third voltage, wherein the decreasing occurs for a third period of time; and increasing the third voltage to a fourth voltage, wherein the increasing occurs for a fourth period of time. |
| 地址 |
San Jose CA US |
