| 摘要 |
PROBLEM TO BE SOLVED: To provide an arc evaporation source capable of stably holding an arc spot at a tip end surface of a target and further, achieving downsizing of the device.SOLUTION: An arc evaporation source 1 includes: a target 3 which is molten and evaporated from a tip end surface 3a thereof by arc discharge; and magnets 4 arranged at positions which are separated from a side surface 3b of the target 3 toward a radial direction of the target 3. The magnet 4 is arranged so as to form a magnetic field MF1 that satisfies the following conditions (a) and (b), on the side surface 3b of the target 3 within a region from the tip end surface 3a of the target 3 to 10 mm in an axial direction of the target 3, namely: (a) an angle formed by a line of magnetic force generated by the magnetic field to the side surface 3b of the target 3 is 45 degrees or less; and (b) a component of the target 3 in the axial direction regarding intensity of the line of magnetic force is 200 G or more.SELECTED DRAWING: Figure 4 |
