发明名称 COMPOSITION FOR FORMING COAT-TYPE INSULATING FILM
摘要 The present invention provides an insulating film formation composition which excels in the solution stability and safety of an organic material for forming an insulating film, and with which it is possible to form an insulating film having low dielectric constant, high insulation resistance, and high wettability due to a coating method, making it possible to form an upper layer by a coating method. This insulating film formation composition includes the cyclic olefin copolymer below and the solvent below. Cyclic olefin copolymer: Copolymer of a cyclic olefin and a chain olefin Solvent: Includes a compound represented by formula (1), the normal boiling point of which is 100℃ to less than 300℃. In formula (1), the ring Z is a ring selected from 5-6 membered saturated or unsaturated cyclic hydrocarbon and a benzene ring, and R1 is a hydrocarbon group or an acyl group. The ring Z has at least an R1O group as a substituent. When two or more substituents are had, the two substituents may be linked with each other and form a ring together with the carbon atoms constituting the ring Z.
申请公布号 WO2016035615(A1) 申请公布日期 2016.03.10
申请号 WO2015JP73860 申请日期 2015.08.25
申请人 DAICEL CORPORATION 发明人 AKAI, YASUYUKI;SUZUKI, YOUJI;YOKOO, TAKESHI
分类号 H01L21/312 主分类号 H01L21/312
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