| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor that can be reduced in size, electronic equipment, and a mobile body.SOLUTION: A physical quantity sensor 1 of the present invention includes: a support substrate 2; an element piece 3 disposed on the support substrate 2; a sealing substrate 5 that is joined to the surface on an opposite side of the support substrate 2 to the element piece 3 and seals the element piece; and a sealing material 7 that is disposed on an opposite side of the sealing substrate 5 to the surface joined to the support substrate 2, and is electrically connected to the element piece. The support substrate 2 has a three-layer structure in which a conductive layer 52, an insulation layer 54, and a conductive layer 53 are stacked in this order.SELECTED DRAWING: Figure 5 |
