| 发明名称 |
TEMPLATE, TEMPLATE MANUFACTURING METHOD, AND IMPRINTING METHOD |
| 摘要 |
According to one embodiment, a pattern region for a device and a mark region are provided on one and the same surface of a substrate. First concave portions are provided in the pattern region, and second concave portions are provided in the mark region. Embedded in the substrate are alignment marks opposed to bottom surfaces of the second concave portions. |
| 申请公布号 |
US2016067910(A1) |
申请公布日期 |
2016.03.10 |
| 申请号 |
US201514636424 |
申请日期 |
2015.03.03 |
| 申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
SUZUKI Masato |
| 分类号 |
B29C59/16;B29C59/00 |
主分类号 |
B29C59/16 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A template, comprising:
a pattern region for a device and a mark region provided on one and the same surface of a substrate; a first concave portion provided in the pattern region; a second concave portion provided in the mark region; and an alignment mark that is embedded in a position opposed to a bottom surface of the second concave portion in the substrate. |
| 地址 |
Tokyo JP |
