DRY PUMP AND EXHAUST GAS TREATMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a dry pump that improves an effect for suppressing reaction product deposition inside a gas exhaust port of the dry pump, gas exhaust piping or the like and improves an energy-saving effect, and to provide an exhaust gas treatment method.SOLUTION: The dry pump includes the gas exhaust piping 18 arranged by being connected to the gas exhaust port 17b of the dry pump 17 and a gas introduction port 19a of a detoxification device 19; and a heat exchanger to which a dilution gas G2 is introduced to heat the dilution gas G2 using the heat generated by the dry pump 17 and introduce the dilution gas into the gas exhaust piping 18 to heat a used gas G1 and increase the temperature of the used gas G1 to a specified value or more.SELECTED DRAWING: Figure 1