MOBILE PLASMA DEVICE

摘要

The present invention relates to a mobile plasma device and particularly to a mobile plasma device for texturing a substrate by moving a plasma source unit for generating a plasma. The mobile plasma device according to the present invention comprises: a tray having a substrate disposed on the upper side thereof; a plasma source unit for generating a plasma and emitting same in the direction in which the tray is disposed; and a moving unit for linearly moving the plasma source unit with respect to the tray, wherein the plasma source unit linearly moves and simultaneously emits the plasma to the substrate placed on the tray.