发明名称 DICING SHEET
摘要 This dicing sheet (1) is provided with an adhesive layer (12) on a base film (11). The adhesive layer (12) is configured to have an elastic modulus of 500 MPa or more but less than 1,200 MPa after curing by means of energy ray irradiation. The base film (11) is configured to have an elastic modulus of 160 MPa or more but less than 500 MPa and a wetting index of 4.5 × 10-4 N or more at a contact surface (surface (11a)) that is in contact with the adhesive layer (12).
申请公布号 WO2016035715(A1) 申请公布日期 2016.03.10
申请号 WO2015JP74487 申请日期 2015.08.28
申请人 LINTEC CORPORATION 发明人 SATO AKINORI;NITO YUKI
分类号 H01L21/301;C09J7/02;C09J201/00 主分类号 H01L21/301
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