| 摘要 |
To improve accuracy of polishing end point detection. Disclosed is an end point detection method whereby an end point is detected on the basis of a drive current to be supplied to a drive unit (a first electric motor or a second electric motor) for rotationally driving a polishing table for holding a polishing pad, or a holding unit (top ring) for holding a subject to be polished and pressing the subject to the polishing pad. The end point detection method is provided with: a step (S102) for determining whether the polishing conditions of a polishing process to be executed match previously set specific polishing conditions; a step (S103) for adjusting current control parameters relating to a drive current change with respect to a drive load change of the drive unit in a drive control unit (motor driver) for controlling the drive current, in the cases where it is determined that the polishing conditions match the specific polishing conditions; and a step (S105) for detecting, on the basis of the current control parameters thus adjusted, the drive current to be supplied to the drive unit, and detecting the end point of polishing on the basis of the drive current thus detected. |
